|
|
 Semiconductor-equpment refurbish |
|
|
|
 |
TEL FURNACE |
* IW-6C,D
* VCF615
* ALPHA-803
* ALPHA-805
* ALPHA-808
* WAVSE
* 303i
INDY
|
SYSTEM FULL REFURBISH
PROCESS CHANGE
RELOCATION
CKD VALVE, EPV-100
|
|
|
KOKUSAI FRUNACE |
* DD/DJ-802V
* DD/DJ-803V
* DD/DJ-813V
* DD/DJ-815V
* DD/DJ-823V
* DD/DJ-825V
* DD/DJ-833V
* DD/DJ-835V
* DD/DJ-853V
* DD/DJ-855V
* DD/DJ-1220
|
SYSTEM FULL REFURBISH
PROCESS CHANGE
RELOCATION
CKD VALVE, EPV-100
|
|
|
RTP |
* AG4100
* HEAT PLUSE 8108
* HEAT PLUSE 8800
|
SYSTEM FULL REFURBISH
PROCESS CHANGE
RELOCATION
|
|
|
SEMITOOL |
* Spin Rinser Dryer.(SRD)
* SST
* SAT
|
SYSTEM FULL REFURBISH
PROCESS CHANGE
RELOCATION
|
|
|
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|
